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At a gathering of a few journalists last week in Wilton, Conn., ASML revealed that it has achieved first light on the NXE:3100, its preproduction EUV tool. Means that the Cymer source is alive, up and operational, said Noreen Harned, vice president of marketing, technology and new business at ASML. All integration and safety checks have been completed, and EUV photons are now traveling through the scanner.
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